PULSLU LASER DEPOZİSYON (PLD) YÖNTEMİ İLE ÜRETİLEN FTO ve ZnO İNCE FİLMLERİN MORFOLOJİK VE OPTİK ÖZELLİKLERİ

Bahri GEZGİN, Serap YİĞİT GEZGİN, Abdullah KEPCEOĞLU, Yasemin GÜNDOĞDU, Hamdi Şükür KILIÇ

Öz


PULSLU LASER DEPOZİSYON (PLD) YÖNTEMİ İLE ÜRETİLEN FTO ve ZnO İNCE FİLMLERİN MORFOLOJİK VE OPTİK ÖZELLİKLERİ 

Özet

Bu çalışmada, PLD tekniği ile oda sıcaklığında (RT) soda lime cam (SLG) alt tabaka üzerine büyütülen Flor (F) katkılı SnO2 (FTO) ve ZnO ince filmlerin üretiminde; laser enerjisinin, filmlerin optik ve morfolojik özellikleri üzerine etkileri incelenmiştir.  Bununla birlikte, faklı O2 gaz basıncında ZnO ince filmleri büyütülmüş ve bir ZnO ince film 300 oC sıcaklıkta tavlanmıştır.  İnce filmlerin, morfolojik yapısı Atomik Kuvvet Mikroskop (AFM) yöntemi, kristal yapısı ise X-ışını kırınımı  (XRD) yöntemi ile analiz edilmiştir.  FTO ve ZnO ince filmleri genel olarak gözenekli yapıdadır.  PLD ile oda sıcaklığındaki SLG üzerine büyütülen FTO ve ZnO ince filmler polikristal yapıya sahiptirler.  İnce filmler spektrumun görünür bölgesinde şeffaftırlar ve 3.75 eV (FTO), 3.50 eV (ZnO), 3.30 eV (tavlanmış ZnO) bant aralıklarına (Eg) sahiptirler. Çalışmada, laser enerjisi (FTO ve ZnO ince filmlerinin), O2 gaz basıncı ve tavlama sıcaklığı değerlerinin (sadece ZnO ince filminin) üretilen ince filmlerin morfolojik ve kristal yapıları ile optik özellikleri üzerine etkileri ayrıntılı olarak incelenmiş ve yorumlanmıştır.

Anahtar Kelimeler: Pulslu Laser Depozisyon, ZnO, FTO, laser, bant aralığı, ince film, polikristal.

MORPHOLOGICAL AND OPTICAL PROPERTIES OF FTO AND ZnO THIN FILMS PRODUCED BY PULSED LASER DEPOSITION (PLD) METHOD

Abstract

In this study, in the production of Fluorine (F) doped SnO2 (FTO) and ZnO thin films grown on soda lime glass (SLG) substrate by PLD technique at room temperature (RT); the effects of laser energy on optical and morphological properties of films have been investigated.  However, ZnO thin films were grown in a different O2 gas pressure and a ZnO thin film was annealed at 300 oC.  The morphological structure of thin films was analysed by Atomic Force Microscopy (AFM) method and the crystal structure by X-ray diffraction (XRD) method.  FTO and ZnO thin films are generally porous. FTO and ZnO thin films grown on PLD at room temperature on SLG substrate have polycrystalline structure. Thin films are transparent in the visible region of the spectrum and have the band gaps (Eg) of 3,75 eV (FTO), 3.50 eV (ZnO), 3.30 eV (annealed ZnO).  In the study, the effects of laser energy (FTO and ZnO thin films), O2 gas pressures and annealing temperature values (only ZnO thin film) on the morphological, crystal structures and optical properties of thin films were examined and interpreted in detail.

Keywords: Pulsed Laser Deposition, ZnO, FTO, laser, band gap, thin film, polycrystalline.


Anahtar Kelimeler


Pulslu Laser Depozisyon, ZnO, FTO, laser, bant aralığı, ince film, polikristal.

Tam Metin:

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Referanslar


B.-j. Li, L.-j. Huang, M. Zhou, N.-f. Ren, and B. Wu, "Surface morphology and photoelectric properties of fluorine-doped tin oxide thin films irradiated with 532nm nanosecond laser," Ceramics International, vol. 40, no. 1, pp. 1627-1633, 2014.

B.-j. Li, L.-j. Huang, N.-f. Ren, and M. Zhou, "Titanium dioxide-coated fluorine-doped tin oxide thin films for improving overall photoelectric property," Applied Surface Science, vol. 290, pp. 80-85, 2014.

E. Premalal, N. Dematage, S. Kaneko, and A. Konno, "Preparation of high quality spray-deposited fluorine-doped tin oxide thin films using dilute di (n-butyl) tin (iv) diacetate precursor solutions," Thin Solid Films, vol. 520, no. 22, pp. 6813-6817, 2012.

H. Hartnagel, Semiconducting transparent thin films. CRC Press, 1995.

A. Stadler, "Transparent conducting oxides—an up-to-date overview," Materials, vol. 5, no. 4, pp. 661-683, 2012.

S. Sohn and Y. S. Han, "Transparent conductive oxide (TCO) films for organic light emissive devices (OLEDS)," in Organic Light Emitting Diode-Material, Process and Devices: InTech, 2011.

T. J. Coutts, T. O. Mason, J. Perkins, and D. S. Ginley, "Transparent conducting oxides: status and opportunities in basic research," Proc. Electrochem. Soc, vol. 99, no. 1999, pp. 274-288, 1999.

R. Manoj and M. Jayaraj, "Characterisation of transparent conducting thin films grown by pulsed laser deposition and RF magnetron sputtering," Department of Physics, 2006.

S. Abdullahi et al., "Optical Characterization of Fluorine doped Tin Oxide (FTO) thin films deposited by spray pyrolysis technique and annealed under Nitrogen atmosphere," International Journal of Innovation and Applied Studies, vol. 9, no. 2, p. 947, 2014.

M. Sahal, B. Hartiti, A. Ridah, M. Mollar, and B. Mari, "Structural, electrical and optical properties of ZnO thin films deposited by sol–gel method," Microelectronics Journal, vol. 39, no. 12, pp. 1425-1428, 2008.

M. Tsoutsouva, C. Panagopoulos, D. Papadimitriou, I. Fasaki, and M. Kompitsas, "ZnO thin films prepared by pulsed laser deposition," Materials Science and Engineering: B, vol. 176, no. 6, pp. 480-483, 2011.

R. Khandelwal et al., "Effects of deposition temperature on the structural and morphological properties of thin ZnO films fabricated by pulsed laser deposition," Optics & Laser Technology, vol. 40, no. 2, pp. 247-251, 2008.

S. Y. Gezgin, A. Kepceoglu, A. Toprak, and H. S. Kilic, "Investigation of Conversion Efficiency of n-ZnO/p-Si Heterojunction Device Produced by Pulsed Laser Deposition (PLD)," in International Congress on Semiconductor Materials and Devices, Konya, 2017: Materials Today Proceedings.

A. O. Mousa, "Fabrication and Characterization of ZnO/p-Si Heterojunction Solar Cell," World Scientific News, vol. 18, pp. 118-132, 2015.

E. M. Park, D. H. Lee, and M. S. Suh, "Effect of Oxygen Flux on FTO Thin Films Using DC and RF Sputtering," Applied Science and Convergence Technology, vol. 24, no. 2, pp. 41-46, 2015.

Z. Chen, K. Shum, T. Salagaj, W. Zhang, and K. Strobl, "ZnO thin films synthesized by chemical vapor deposition," in Applications and Technology Conference (LISAT), 2010 Long Island Systems, 2010, pp. 1-6: IEEE.

M. Opel, S. Geprägs, M. Althammer, T. Brenninger, and R. Gross, "Laser molecular beam epitaxy of ZnO thin films and heterostructures," Journal of Physics D: Applied Physics, vol. 47, no. 3, p. 034002, 2013.

G. Socol et al., "Pulsed laser deposition of transparent conductive oxide thin films on flexible substrates," Applied Surface Science, vol. 260, pp. 42-46, 2012.

Y. R. Jang, K.-H. Yoo, and S. M. Park, "Properties of ZnO thin films grown on Si (100) substrates by pulsed laser deposition," Journal of Materials Science & Technology, vol. 26, no. 11, pp. 973-976, 2010.

M. Afzaal, H. M. Yates, and J. L. Hodgkinson, "Translation Effects in Fluorine Doped Tin Oxide Thin Film Properties by Atmospheric Pressure Chemical Vapour Deposition," Coatings, vol. 6, no. 4, p. 43, 2016.

S. Y. Gezgin, H. Ş. Kılıç, A. Kepceoğlu, S. Bayır, İ. E. Nalbantoğlu, and A. Toprak, "Plasmonic tuning of gold doped thin films for layers of photovoltaic devices," in 9TH INTERNATIONAL PHYSICS CONFERENCE OF THE BALKAN PHYSICAL UNION (BPU-9), 2016, vol. 1722, p. 200013: AIP Publishing.

S. Y. Gezgin, A. Kepceoğlu, and H. Ş. Kılıç, "An investigation of localised surface plasmon resonance (LSPR) of Ag nanoparticles produced by pulsed laser deposition (PLD) technique," in AIP Conference Proceedings, 2017, vol. 1815, no. 1, p. 030019: AIP Publishing.

S. Y. Gezgin, A. Kepceoğlu, and H. Ş. Kılıç, "An experimental investigation of localised surface plasmon resonance (LSPR) for Cu nanoparticles depending as a function of laser pulse number in Pulsed Laser Deposition," AIP Conference Proceedings, vol. 1815, no. 1, p. 030020, 2017.

H. Durmuş, H. Ş. Kılıç, S. Y. Gezgin, and Ş. Karataş, "Analysis of Current-Voltage-Temperature and Capacitance-Voltage-Temperature Characteristics of Re/n-Si Schottky Contacts," Silicon, pp. 1-9, 2016.

W. Marine, L. Patrone, B. Luk'yanchuk, and M. Sentis, "Strategy of nanocluster and nanostructure synthesis by conventional pulsed laser ablation," Applied surface science, vol. 154, pp. 345-352, 2000.

J. Alonso, R. Diamant, P. Castillo, M. Acosta–García, N. Batina, and E. Haro-Poniatowski, "Thin films of silver nanoparticles deposited in vacuum by pulsed laser ablation using a YAG: Nd laser," Applied Surface Science, vol. 255, no. 9, pp. 4933-4937, 2009.

S. Verma, B. T. Rao, S. Rai, V. Ganesan, and L. M. Kukreja, "Influence of process parameters on surface plasmon resonance characteristics of densely packed gold nanoparticle films grown by pulsed laser deposition," (in English), Applied Surface Science, vol. 258, no. 11, pp. 4898-4905, Mar 15 2012.

J. Schou, "Physical aspects of the pulsed laser deposition technique: The stoichiometric transfer of material from target to film," (in English), Applied Surface Science, vol. 255, no. 10, pp. 5191-5198, Mar 1 2009.

A. Zawadzka, P. Płóciennik, Y. El Kouari, H. Bougharraf, and B. Sahraoui, "Linear and nonlinear optical properties of ZnO thin films deposited by pulsed laser deposition," Journal of Luminescence, vol. 169, pp. 483-491, 2016.

V. Serbezov, S. Sotirov, K. Benkhouja, A. Zawadzka, and B. Sahraoui, "Investigation of superfast deposition of metal oxide and Diamond-Like Carbon thin films by nanosecond Ytterbium (Yb+) fiber laser," Optical Materials, vol. 36, no. 1, pp. 53-59, 2013.

H. El Ouazzani et al., "Novel styrylquinolinium dye thin films deposited by pulsed laser deposition for nonlinear optical applications," The Journal of Physical Chemistry C, vol. 116, no. 12, pp. 7144-7152, 2012.

H. Ş. Kılıç and H. Durmuş, "YENİ BİR PULS LASER DEPOZİSYON (PLD) SİSTEMİ TASARIMI, ÜRETİMİ VE UYGULAMALARI," Selçuk Teknik Online Dergi, vol. 15, no. 1, pp. 24-43, 2016.

T. E. Itina, W. Marine, and M. Autric, "Monte Carlo simulation of pulsed laser ablation from two-component target into diluted ambient gas," (in English), Journal of Applied Physics, vol. 82, no. 7, pp. 3536-3542, Oct 1 1997.

E. Fazio, F. Neri, P. M. Ossi, N. Santo, and S. Trusso, "Growth process of nanostructured silver films pulsed laser ablated in high-pressure inert gas," (in English), Applied Surface Science, vol. 255, no. 24, pp. 9676-9679, Sep 30 2009.

Z. Y. Pan et al., "Oriented growth of CoPt nanoparticles by pulsed laser deposition," (in English), Applied Physics a-Materials Science & Processing, vol. 101, no. 4, pp. 609-613, Dec 2010.

K. Sturm, S. Fahler, and H. U. Krebs, "Pulsed laser deposition of metals in low pressure inert gas," (in English), Applied Surface Science, vol. 154, pp. 462-466, Feb 2000.

P. Gondoni, M. Ghidelli, F. Di Fonzo, A. L. Bassi, and C. S. Casari, "Fabrication of nano-engineered transparent conducting oxides by pulsed laser deposition," Journal of visualized experiments: JoVE, no. 72, 2013.

F. Shan and Y. Yu, "Band gap energy of pure and Al-doped ZnO thin films," Journal of the European Ceramic Society, vol. 24, no. 6, pp. 1869-1872, 2004.

Q. Zhang, P. Liu, C. Miao, Z. Chen, C. L. Wu, and C.-H. Shek, "Formation of orthorhombic SnO 2 originated from lattice distortion by Mn-doped tetragonal SnO 2," RSC Advances, vol. 5, no. 49, pp. 39285-39290, 2015.

Y. Ryu, S. Zhu, S. Han, and H. White, "Application of pulsed-laser deposition technique for cleaning a GaAs surface and for epitaxial ZnSe film growth," Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 16, no. 5, pp. 3058-3063, 1998.

A. Janotti and C. G. Van de Walle, "Fundamentals of zinc oxide as a semiconductor," Reports on progress in physics, vol. 72, no. 12, p. 126501, 2009.


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